Universiti Kebangsaan Malaysia


Address Level 4, Research Complex
Universiti Kebangsaan Malaysia
43600 Bangi
Selangor, Malaysia

Services

Service Department
Ceramic Hotplate (Fischer Scientific)
Institute of Microengineering & Nanoelectronics (IMN)
Chemical freezer
Institute of Microengineering & Nanoelectronics (IMN)
Coating Dispensing System - resist spinner (Spin Coater P6700)
Institute of Microengineering & Nanoelectronics (IMN)
Coventor :??? MEMS simulation
Institute of Microengineering & Nanoelectronics (IMN)
DACTRON shaker
Institute of Microengineering & Nanoelectronics (IMN)
DC/RF Sputtering System
Institute of Microengineering & Nanoelectronics (IMN)
DI water system
Institute of Microengineering & Nanoelectronics (IMN)
DWL 66 Laser Write (Heidelberg DWL)
Institute of Microengineering & Nanoelectronics (IMN)
E-Beam Evaporator (Edwards Auto 306 Turbo)
Institute of Microengineering & Nanoelectronics (IMN)
Electrochemical Etch System
Institute of Microengineering & Nanoelectronics (IMN)
Ellipsometer (Melles Griot 05-LHP-321)
Institute of Microengineering & Nanoelectronics (IMN)
Eye wash station
Institute of Microengineering & Nanoelectronics (IMN)
Fourier Transform Infrared (FTIR) (FTS 3000MX)
Institute of Microengineering & Nanoelectronics (IMN)
Fumehood / Wetbench
Institute of Microengineering & Nanoelectronics (IMN)
General purpose oven
Institute of Microengineering & Nanoelectronics (IMN)
ICP PlasmaLab System 100 (Deep RIE)
Institute of Microengineering & Nanoelectronics (IMN)
Intellisuite : MEMS simulation
Institute of Microengineering & Nanoelectronics (IMN)
Karl-Suss MJB Mask Aligner (Karl Suss)
Institute of Microengineering & Nanoelectronics (IMN)
Leica Material Workstation (Leica DMLA)
Institute of Microengineering & Nanoelectronics (IMN)
LPCVD Oxidation Three Stack Furnace (KoyoLab)
Institute of Microengineering & Nanoelectronics (IMN)
Metal evaporator (Med 010 Balzers)
Institute of Microengineering & Nanoelectronics (IMN)
Oxidation Furnace
Institute of Microengineering & Nanoelectronics (IMN)
Ozone cleaner (UVO cleaner 144AX-220)
Institute of Microengineering & Nanoelectronics (IMN)
Philips XL20 Scanning Electron Microscope (Philips XL 30 Series)
Institute of Microengineering & Nanoelectronics (IMN)
Plasma Enhanced Chemical Vapour Deposition
Institute of Microengineering & Nanoelectronics (IMN)
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Institute of Microengineering & Nanoelectronics (IMN)
Portable Liquid N2 tank
Institute of Microengineering & Nanoelectronics (IMN)
Probe station (Micromanipulator)
Institute of Microengineering & Nanoelectronics (IMN)
Programmable Spin CoaterOther machines / facilities
Institute of Microengineering & Nanoelectronics (IMN)
PZT Testing
Institute of Microengineering & Nanoelectronics (IMN)
Resist Spin Coater (Mikasa SpinCoater 1H-D3)
Institute of Microengineering & Nanoelectronics (IMN)
SECA Microscope
Institute of Microengineering & Nanoelectronics (IMN)
Sputter Coater (Baltec SCD-005)
Institute of Microengineering & Nanoelectronics (IMN)
Thermolyne Hotplate (Thermolyne)
Institute of Microengineering & Nanoelectronics (IMN)
Thickness Mapping System
Institute of Microengineering & Nanoelectronics (IMN)
Ultrasonic Cleaner (Brinson 1200)
Institute of Microengineering & Nanoelectronics (IMN)
VEECO surface profiler (WYKO NT1100)
Institute of Microengineering & Nanoelectronics (IMN)
Wafer scriber (Karl Suss)
Institute of Microengineering & Nanoelectronics (IMN)
Wet station
Institute of Microengineering & Nanoelectronics (IMN)
Wire bonding system
Institute of Microengineering & Nanoelectronics (IMN)